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Volume 6 Issue 4
Jul.  2019

IEEE/CAA Journal of Automatica Sinica

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Hui Chen, Zhendong Sun, Weijie Sun and John Tze Wei Yeow, "Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System," IEEE/CAA J. Autom. Sinica, vol. 6, no. 4, pp. 1060-1067, June 2019. doi: 10.1109/JAS.2016.7510223
Citation: Hui Chen, Zhendong Sun, Weijie Sun and John Tze Wei Yeow, "Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System," IEEE/CAA J. Autom. Sinica, vol. 6, no. 4, pp. 1060-1067, June 2019. doi: 10.1109/JAS.2016.7510223

Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System

doi: 10.1109/JAS.2016.7510223
Funds:

the National Natural Science Foundation of China 61374036

the National Natural Science Foundation of China 61703142

the National Natural Science Foundation of China U1504615

the Scientific Research Key Foundation of Higher Education Institutions of Henan Province 16A413001

More Information
  • In this paper, we present a twisting control scheme with proportional-integral-derivative (PID) sliding surface for a two-axis electrostatic torsional micromirror, and the utilization of the proposed scheme in a laser scanning system. The experimental results of set-point regulation verify that the proposed scheme provides enhanced transient response and positioning performance as compared to traditional sliding mode control. To evaluate the tracking performance of the closed-loop system, triangular waves with different frequencies are used as desired traces. With the proposed scheme the experimental results verified that the closed-loop controlled micromirror follows the given triangular trajectories precisely. A micromirror-based laser scanning system is developed to obtain images. When compared with open-loop control, the experimental results demonstrated that the proposed scheme is able to reduce the distortion of the raster scan, and improve the imaging performance in the presence of cross-coupling effect.

     

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    Highlights

    • A twisting control scheme with Proportional-Integral-Derivative(PID) sliding surface for a two-axis electrostatic torsional micromirror is proposed.
    • A closed-loop controlled micromirror-based laser scanning system is developed.
    • The proposed scheme is able to reduce the distortion of the raster scan in the presence of cross-coupling effect.

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